Table 1: Resistivity of the Cu thin films obtained from the oxidation stages.
Resistivity, (Ω·cm) Stage Remark
ρ0 = 1.720 x 10-8 pure Cu
ρI = 2.074 x 10-8 (I) until 7 days
ρII = 2.985 x 10-8 (II) since 7 until 20 days
ρIII> ρII (III) after 33 days